DC magnetron sputter deposition in pure helium gas: formation of porous films or gas/solid nanocomposite coatings
| Autor: | Ibrahim, Sara, Fernández, Asunción, Brault, Pascal, Sauldubois, Audrey, Desgardin, Pierre, Caillard, Amael, Hufschmidt, Dirk, de Haro, Maria-Carmen Jiménez, Sauvage, Thierry, Barthe, Marie-France, Thomann, Anne-Lise |
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| Zdroj: | In Vacuum June 2024 224 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect