Effect of peak discharge current on the ion current density on the substrate in the short-pulse HiPIMS
| Autor: | Oskirko, V.O., Kozhevnikov, V.Y., Pavlov, A.P., Zakharov, A.N., Grenadyorov, A.S., Solovyev, A.A. |
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| Zdroj: | In Vacuum June 2024 224 |
| Databáze: | ScienceDirect |
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