Control of hydrogen concentration on InGaZnO thin film using cryopumping system
| Autor: | Park, Jeong-Min, Jung, Se-Yeon, Lee, Sein, Song, Young-Woong, Lee, Junseo, Yoon, Jeong Hyun, Ham, Wooho, Choi, Hyelim, Kwon, Jang-Yeon |
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| Zdroj: | In Vacuum March 2024 221 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect