Evaluating the Ge: C ratio on the bonding structure, hardness, and residual stress of Ge1-x-Cx coatings fabricated by the PE-CVD method
| Autor: | Jamali, H., Mozaffarinia, R., Eshaghi, A., Ghasemi, A., Tavoosi, M., Gordani, G.R., Rezazadeh, M., Ahmadi-Pidani, R., Torkian, S., Mohammad Sharifi, E., Loghman Estarki, M.R. |
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| Zdroj: | In Vacuum February 2024 220 |
| Databáze: | ScienceDirect |
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