Gallium phosphide conformal film growth on in-situ tri-TBP dry-cleaned InGaP/GaAs using atomic hydrogen ALD
| Autor: | Yun, SeongUk, Lee, Ping-Che, Kuo, Cheng-Hsuan, Mcleod, Aaron J., Zhang, Zichen, Wang, Victor, Huang, James, Kashyap, Harshil, Winter, Charles H., Kummel, Andrew C. |
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| Zdroj: | In Vacuum February 2024 220 |
| Databáze: | ScienceDirect |
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