Elastic backscattering during boron implantation in Si1-xGex
| Autor: | Bai, Quan, Dialameh, Masoud, Morris, Richard J.H., Vickridge, Ian, Vantomme, André, Meersschaut, Johan |
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| Zdroj: | In Vacuum January 2024 219 Part A |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect