Physical feature exploration of nanocrystalline FeSi2 surface with argon plasma etching under varying power
| Autor: | Borwornpornmetee, Nattakorn, Sittimart, Phongsaphak, Phatthanakun, Rungrueang, Nakajima, Hideki, Paosawatyanyong, Boonchoat, Yoshitake, Tsuyoshi, Promros, Nathaporn |
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| Zdroj: | In Vacuum December 2023 218 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect