Commissioning of a two-target DC cylindrical magnetron sputter coater for depositing Nb₃Sn film on Nb superconducting radiofrequency cavities

Autor: Shakel, Md Sharifuzzaman, Sayeed, Md Nizam, Eremeev, Grigory V., Valente-Feliciano, Anne-Marie, Pudasaini, Uttar, Elsayed-Ali, Hani E.
Zdroj: In Vacuum November 2023 217
Databáze: ScienceDirect