Interface tuning and electrical property optimization of La-doped ZrO2 gate dielectric based on solution driving
| Autor: | Cai, Haotian, Tuokedaerhan, Kamale, Lu, Zhenchuan, Zhang, Renjia, Du, Hongguo |
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| Zdroj: | In Vacuum November 2023 217 |
| Databáze: | ScienceDirect |
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