The role of nitrogen addition in C4F8/Ar plasma to modulate the plasma process from polymerization to etching
| Autor: | Park, Woojin, Han, Jonggu, Park, Solee, Moon, Se Youn |
|---|---|
| Zdroj: | In Vacuum October 2023 216 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Park, Woojin, Han, Jonggu, Park, Solee, Moon, Se Youn |
|---|---|
| Zdroj: | In Vacuum October 2023 216 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect