The influence of pulse duration and duty cycle on the energy flux to the substrate in high power impulse magnetron sputtering
| Autor: | Oskirko, V.O., Zakharov, A.N., Grenadyorov, A.S., Pavlov, A.P., Semenov, V.A., Rabotkin, S.V., Kozhevnikov, V. Yu., Solovyev, A.A. |
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| Zdroj: | In Vacuum October 2023 216 |
| Databáze: | ScienceDirect |
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