Comparative study of thermal behavior of a series beta-diketonate precursors for chemical vapor deposition of lithium-containing films
| Autor: | Turgambaeva, Asiya E., Urkasym kyzy, Samara, Korolkov, Ilya V., Maksimovskiy, Evgene A., Syrokvashin, Mikhail M., Stabnikov, Pavel A., Krisyuk, Vladislav V. |
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| Zdroj: | In Vacuum September 2023 215 |
| Databáze: | ScienceDirect |
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