Characteristics of a pulsed hollow cathode discharge operated in an Ar+O[formula omitted] gas mixture and deposition of copper nickel oxide thin films
| Autor: | Kapran, Anna, Hippler, Rainer, Wulff, Harm, Olejnicek, Jiri, Pisarikova, Aneta, Cada, Martin, Hubicka, Zdenek |
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| Zdroj: | In Vacuum September 2023 215 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect