Effects of seed layer thickness and post-annealing process on crystalline quality of β-Ga2O3 films prepared on Si (100) substrate by RF magnetron sputtering
| Autor: | Mi, Wei, Li, Xinwei, Ding, Yue, Wang, Di, Xu, Mingsheng, Xiao, Longfei, Zhang, Xingcheng, Chen, Xinrong, Li, Bingkun, Luo, Liyuan, Zhao, Jinshi, Zhou, Liwei, Yu, Junli |
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| Zdroj: | In Vacuum August 2023 214 |
| Databáze: | ScienceDirect |
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