Tailoring the structural and optical properties of fabricated TiO2 thin films by O2 duty cycle in reactive gas-timing magnetron sputtering
| Autor: | Chittinan, Donyawan, Buranasiri, Prathan, Lertvanithphol, Tossaporn, Eiamchai, Pitak, Tantiwanichapan, Khwanchai, Sathukarn, Asmar, Limwichean, Saksorn, Klamchuen, Annop, Wutikhun, Tuksadon, Limsuwan, Pichet, Nakajima, Hideki, Phae-ngam, Wuttichai, Triamnak, Narit, Horprathum, Mati |
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| Zdroj: | In Vacuum August 2023 214 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect