Numerical framework for multi-scale modeling planar DC magnetron sputtering
| Autor: | Tran, Si Bui Quang, Leong, Fong Yew, Hariharaputran, Ramanarayan, Wenjun, Ding, Lai, Po-Yen, Le, Duc Vinh |
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| Zdroj: | In Vacuum July 2023 213 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect