Gas-phase parameters and densities of atomic species in Cl2 + O2 + Ar plasma: Effects of O2/Ar and Cl2/Ar mixing ratios
| Autor: | Efremov, Alexander, Amirov, Ildar, Izyumov, Mikhail |
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| Zdroj: | In Vacuum January 2023 207 |
| Databáze: | ScienceDirect |
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