Structural characteristics of 3C–SiC thin films grown on Si-face and C-face 4H–SiC substrates by high temperature chemical vapor deposition
| Autor: | Feng, Zhe Chuan, Lin, Hao-Hsiung, Xin, Bin, Tsai, Shi-Jane, Saravade, Vishal, Yiin, Jeffrey, Klein, Benjamin, Ferguson, Ian T. |
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| Zdroj: | In Vacuum January 2023 207 |
| Databáze: | ScienceDirect |
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