Modulation of carrier density in indium–gallium–zinc-oxide thin film prepared by high-power impulse magnetron sputtering

Autor: Zhao, Ming-Jie, Chen, Zuo-Zhu, Shi, Chun-Yan, Chen, Qi-Zhen, Xu, Miao, Wu, Wan-Yu, Wuu, Dong-Sing, Lien, Shui-Yang, Zhu, Wen-Zhang
Zdroj: In Vacuum January 2023 207
Databáze: ScienceDirect