Modulation of carrier density in indium–gallium–zinc-oxide thin film prepared by high-power impulse magnetron sputtering
Autor: | Zhao, Ming-Jie, Chen, Zuo-Zhu, Shi, Chun-Yan, Chen, Qi-Zhen, Xu, Miao, Wu, Wan-Yu, Wuu, Dong-Sing, Lien, Shui-Yang, Zhu, Wen-Zhang |
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Zdroj: | In Vacuum January 2023 207 |
Databáze: | ScienceDirect |
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