High-rate magnetron deposition of CuOx films in the metallic mode enhanced by radiofrequency inductively coupled plasma source
| Autor: | Sidelev, Dmitrii V., Voronina, Ekaterina D., Grudinin, Vladislav A. |
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| Zdroj: | In Vacuum January 2023 207 |
| Databáze: | ScienceDirect |
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