Short pulse-enhanced vacuum arc evaporation

Autor: Oskirko, V.O., Goncharenko, I.M., Arestov, S.I., Semenov, V.A., Azhgikhin, M.I., Pavlov, A.P., Solovyev, A.A.
Zdroj: In Vacuum November 2022 205
Databáze: ScienceDirect