In-situ thermal cleaning of the sapphire substrate and temperature effect on epitaxial AlN
| Autor: | Koçak, Merve Nur a, b, Yolcu, Gamze a, b, Horoz, Sabit a, d, Altuntaş, İsmail a, c, Demir, İlkay a, c, ∗ |
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| Zdroj: | In Vacuum November 2022 205 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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