Plasma diagnostics and film growth of multicomponent nitride thin films with magnetic-field-assisted-dc magnetron sputtering
| Autor: | Rao, Smita G., Shu, Rui, Boyd, Robert, le Febvrier, Arnaud, Eklund, Per |
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| Zdroj: | In Vacuum October 2022 204 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect