Arc energy minimization in high-power impulse magnetron sputtering
| Autor: | Oskirko, V.O., Semenov, V.D., Solovyev, A.A., Rabotkin, S.V., Pavlov, A.P., Zakharov, A.N. |
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| Zdroj: | In Vacuum August 2022 202 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Oskirko, V.O., Semenov, V.D., Solovyev, A.A., Rabotkin, S.V., Pavlov, A.P., Zakharov, A.N. |
|---|---|
| Zdroj: | In Vacuum August 2022 202 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect