Interpretation of hydrogen incorporation into radio frequency sputtered amorphous silicon based on Berg modelling
| Autor: | Hegedüs, Nikolett, Lovics, Riku, Serényi, Miklós, Zolnai, Zsolt, Petrik, Péter, Balázsi, Csaba, Balázsi, Katalin |
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| Zdroj: | In Vacuum August 2022 202 |
| Databáze: | ScienceDirect |
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