Specific features of the structure and properties of arc-PVD coatings depending on the spatial arrangement of the sample in the chamber
| Autor: | Grigoriev, Sergey, Vereschaka, Alexey, Zelenkov, Vsevolod, Sitnikov, Nikolay, Bublikov, Jury, Milovich, Filipp, Andreev, Nikolay, Mustafaev, Enver |
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| Zdroj: | In Vacuum June 2022 200 |
| Databáze: | ScienceDirect |
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