Short-pulse high-power dual magnetron sputtering
| Autor: | Oskirko, V.O., Zakharov, A.N., Semenov, V.A., Pavlov, A.P., Grenadyorov, A.S., Rabotkin, S.V., Solovyev, A.A. |
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| Zdroj: | In Vacuum June 2022 200 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Oskirko, V.O., Zakharov, A.N., Semenov, V.A., Pavlov, A.P., Grenadyorov, A.S., Rabotkin, S.V., Solovyev, A.A. |
|---|---|
| Zdroj: | In Vacuum June 2022 200 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect