High mobility silicon indium oxide thin-film transistor fabrication by sputtering process
| Autor: | Arulkumar, S., Parthiban, S., Kwon, J.Y., Uraoka, Y., Bermundo, J.P.S., Mukherjee, Arka, Das, Bikas C. |
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| Zdroj: | In Vacuum May 2022 199 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect