Mutual influence of the channels in a combined discharge based on the RF inductive and DC discharges
| Autor: | Kralkina, E.A., Nekludova, P.A., Nikonov, A.M., Vavilin, K.V., Zadiriev, I.I. |
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| Zdroj: | In Vacuum April 2022 198 |
| Databáze: | ScienceDirect |
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