Effect of adding an upper-substrate holder in the quartz-tube MPCVD on plasma parameters

Autor:	Geng, Chuanwen, Ma, Zhibin, Zhao, Peng, Zeng, Meihua, Zhang, Xiaodong
Zdroj:	In Vacuum March 2022 197
Databáze:	ScienceDirect
Externí odkaz:	Zobrazit plný text záznamu Full Text from ScienceDirect