Formation of nanoporous Ge layers by ion implantation at different temperatures of c-Ge substrate
| Autor: | Stepanov, A.L., Khantimerov, S.M., Nuzhdin, V.I., Valeev, V.F., Rogov, A.M. |
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| Zdroj: | In Vacuum December 2021 194 |
| Databáze: | ScienceDirect |
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