Planar magnetron discharge with confinement of injected electrons
| Autor: | Shandrikov, M.V., Artamonov, I.D., Bakeev, I.Yu., Bugaev, A.S., Oks, E.M., Vizir, A.V., Yushkov, G. Yu |
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| Zdroj: | In Vacuum October 2021 192 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Shandrikov, M.V., Artamonov, I.D., Bakeev, I.Yu., Bugaev, A.S., Oks, E.M., Vizir, A.V., Yushkov, G. Yu |
|---|---|
| Zdroj: | In Vacuum October 2021 192 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect