Optimization of the two parameters in the deconvolution procedure for obtaining the original in-depth distribution of composition from measured sputter depth profile by genetic algorithm
| Autor: | Wang, C.L., Li, J., Liu, X.X., Chen, Y.L., Tan, Z.H., Li, H.W., Yang, H., Lian, S.Y., Wang, J.Y., Xu, C.K. |
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| Zdroj: | In Vacuum February 2021 184 |
| Databáze: | ScienceDirect |
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