Improved dielectric properties of La2O3–ZrO2 bilayer films for novel gate dielectrics
| Autor: | Li, Shuan, Lin, Youyu, Li, Guoling, Yu, Hongen, Tang, Siyao, Wu, Yiman, Li, Xingguo, Tian, Wenhuai |
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| Zdroj: | In Vacuum August 2020 178 |
| Databáze: | ScienceDirect |
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