Structural and optical properties of Si hyperdoped with Te by ion implantation and pulsed laser annealing

Autor: Komarov, Fadei F., Nechaev, Nikita S., Ivlev, Gennadii D., Vlasukova, Liudmila A., Parkhomenko, Irina N., Wendler, Elke, Romanov, Ivan A., Berencén, Yonder, Pilko, Vladimir V., Zhigulin, Dmitrii V., Komarov, Alexander F.
Zdroj: In Vacuum August 2020 178
Databáze: ScienceDirect