Structural and optical properties of Si hyperdoped with Te by ion implantation and pulsed laser annealing
Autor: | Komarov, Fadei F., Nechaev, Nikita S., Ivlev, Gennadii D., Vlasukova, Liudmila A., Parkhomenko, Irina N., Wendler, Elke, Romanov, Ivan A., Berencén, Yonder, Pilko, Vladimir V., Zhigulin, Dmitrii V., Komarov, Alexander F. |
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Zdroj: | In Vacuum August 2020 178 |
Databáze: | ScienceDirect |
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