Optimisation of the RGA location in the evaluation of NEG coating pumping properties

Autor: Seify, Omid, Malyshev, Oleg B., Širvinskaitė, Rūta, Valizadeh, Reza, Hannah, AdrianN.
Zdroj: In Vacuum July 2019 165:207-214
Databáze: ScienceDirect