Cubic BN thin film deposition by a RF magnetron sputtering
| Autor: | Pat, Suat, Şilik, Erbil, Musaoğlu, Caner, Özen, Soner, Mohammadigharehbagh, Reza, Yudar, H. Hakan, Korkmaz, Şadan |
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| Zdroj: | In Vacuum November 2018 157:31-35 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect