Water vapor transmission rate property of SiNx thin films prepared by low temperature (
| Autor: | Yun, Seung-Jin, Abidov, Amir, Kim, Sungjin, Choi, Jung-Su, Cho, Byeong Seong, Chung, Seog Chul |
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| Zdroj: | In Vacuum February 2018 148:33-40 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect