HPPMS deposition from composite targets: Effect of two orders of magnitude target power density changes on the composition of sputtered Cr-Al-C thin films
| Autor: | Rueß, H., to Baben, M., Mráz, S., Shang, L., Polcik, P., Kolozsvári, S., Hans, M., Primetzhofer, D., Schneider, J.M. |
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| Zdroj: | In Vacuum November 2017 145:285-289 |
| Databáze: | ScienceDirect |
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