An inverted gapped-target sputter magnetron for the deposition of thin ferromagnetic films
| Autor: | Poolcharuansin, Phitsanu, Laokul, Paveena, Pasaja, Nitisak, Chingsungnoen, Artit, Horprathum, Mati, Chindaudom, Pongpan, Bradley, James W. |
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| Zdroj: | In Vacuum July 2017 141:41-48 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect