Magnetron sputtering of Si-Al-N nanocomposite coatings on quartz for protection against impacts of high speed microparticles
| Autor: | Sergeev, V., Psakhie, S., Chubik, P., Cherniavsky, A., Soloviev, V., Solntsev, V., Khristenko, Yu. |
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| Zdroj: | In Vacuum September 2017 143:454-457 |
| Databáze: | ScienceDirect |
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