Growth defects in magnetron sputtered PVD films deposited in UHV environment
| Autor: | Čekada, Miha, Radić, Nikola, Jerčinović, Marko, Panjan, Matjaž, Panjan, Peter, Drnovšek, Aljaž, Car, Tihomir |
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| Zdroj: | In Vacuum April 2017 138:213-217 |
| Databáze: | ScienceDirect |
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