Study of the formation mechanism of hierarchical silicon structures produced by sequential ion beam irradiation and anodic etching
| Autor: | Punzón-Quijorna, Esther, Kajari-Shröder, Sarah, Agulló-Rueda, Fernando, Manso Silván, Miguel, Martín-Palma, Raul José, Herrero Fernández, Pilar, Torres-Costa, Vicente, Climent-Font, Aurelio |
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| Zdroj: | In Vacuum April 2017 138:238-243 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect