Interference effects of multi-head operation of anode layer Side by side (SBS) system
| Autor: | Miyasaka, Takeshi, Uyama, Yudai, Yoshida, Mikoto, Miyake, Yoshimi, Shimizu, Daichi, Goto, Ryota, Sakoda, Masahiro |
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| Zdroj: | In Vacuum February 2017 136:184-189 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect