Effect of energy on the formation of flexible hard Al-Si-N films prepared by magnetron sputtering

Autor: Musil, J., Javdošňák, D., Čerstvý, R., Haviar, S., Remnev, G., Uglov, V.
Zdroj: In Vacuum November 2016 133:43-45
Databáze: ScienceDirect
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