Energy and substance transfer in magnetron sputtering systems with liquid-phase target
| Autor: | Bleykher, G.A., Krivobokov, V.P., Yurjeva, A.V., Sadykova, I. |
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| Zdroj: | In Vacuum February 2016 124:11-17 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Bleykher, G.A., Krivobokov, V.P., Yurjeva, A.V., Sadykova, I. |
|---|---|
| Zdroj: | In Vacuum February 2016 124:11-17 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect