Sticking probabilities of Cu, Zn, Sn, and S atoms in magnetron sputtering plasmas employing a Cu2ZnSnS4 stoichiometric target

Autor: Nafarizal, Nayan, Kikuchi, Shunya, Sasaki, Koichi
Zdroj: In Vacuum November 2015 121:26-31
Databáze: ScienceDirect