Sticking probabilities of Cu, Zn, Sn, and S atoms in magnetron sputtering plasmas employing a Cu2ZnSnS4 stoichiometric target
Autor: | Nafarizal, Nayan, Kikuchi, Shunya, Sasaki, Koichi |
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Zdroj: | In Vacuum November 2015 121:26-31 |
Databáze: | ScienceDirect |
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