Effect of pulsed off-times on the reactive HiPIMS preparation of zirconia thin films
| Autor: | Zhao, Xiaoli, Jin, Jie, Cheng, Jui-Ching, Lee, Jyh-Wei, Wu, Kuo-Hong, Liu, Kou-Chen |
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| Zdroj: | In Vacuum August 2015 118:38-42 |
| Databáze: | ScienceDirect |
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