Sputtered molybdenum films: Structure and property evolution with film thickness
Autor: | Hofer, A.M., Schlacher, J., Keckes, J., Winkler, J., Mitterer, C. |
---|---|
Zdroj: | In Vacuum January 2014 99:149-152 |
Databáze: | ScienceDirect |
Externí odkaz: |
Autor: | Hofer, A.M., Schlacher, J., Keckes, J., Winkler, J., Mitterer, C. |
---|---|
Zdroj: | In Vacuum January 2014 99:149-152 |
Databáze: | ScienceDirect |
Externí odkaz: |