Plasma emission monitoring (PEM) controlled DC reactive sputtered ZnO:Al thin films

Autor: Nsimama, P.D., Niklasson, G.A., Samiji, M.E., Mbise, G.W., Wennerberg, J.
Zdroj: In Vacuum 20 July 2012 86(12):1939-1944
Databáze: ScienceDirect
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